Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7147983 | Dyed photoresists and methods and articles of manufacture comprising same | James Michael Mori, James W. Thackeray, Roger F. Sinta, Rosemary Bell, Robin L. Miller-Fahey +3 more | 2006-12-12 |
| 7026101 | Antireflective coating compositions | Peter Trefonas, III, Edward K. Pavelchek | 2006-04-11 |
| 6855466 | Planarizing antireflective coating compositions | Edward K. Pavelchek, Timothy G. Adams, Suzanne M. Coley, George G. Barclay | 2005-02-15 |
| 6849373 | Antireflective coating compositions comprising photoacid generators | Edward K. Pavelchek | 2005-02-01 |
| 6653049 | High conformality antireflective coating compositions | Edward K. Pavelchek, Timothy G. Adams | 2003-11-25 |
| 6602652 | Antireflective coating compositions and exposure methods under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Robert F. Blacksmith, Peter Trefonas, III | 2003-08-05 |
| 6503689 | Antireflective composition | Anthony Zampini, Robert Howard Gore | 2003-01-07 |
| 6410209 | Methods utilizing antireflective coating compositions with exposure under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Robert F. Blacksmith, Peter Trefonas, III | 2002-06-25 |
| 6316165 | Planarizing antireflective coating compositions | Edward K. Pavelchek, Timothy G. Adams, Suzanne M. Coley, George G. Barclay | 2001-11-13 |
| 6261743 | Antireflective coating compositions comprising photoacid generators | Edward K. Pavelchek | 2001-07-17 |
| 6190839 | High conformality antireflective coating compositions | Edward K. Pavelchek, Timothy G. Adams | 2001-02-20 |
| 5939236 | Antireflective coating compositions comprising photoacid generators | Edward K. Pavelchek | 1999-08-17 |
| 5876899 | Photoresist compositions | Charles R. Szmanda, Gary N. Taylor, Robert L. Brainard | 1999-03-02 |