Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602652 | Antireflective coating compositions and exposure methods under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Manuel DoCanto, Peter Trefonas, III | 2003-08-05 |
| 6410209 | Methods utilizing antireflective coating compositions with exposure under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Manuel DoCanto, Peter Trefonas, III | 2002-06-25 |