Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585356 | Projection exposure apparatus and method for measuring a projection lens | Eugen Foca, Uwe Hempelmann, Frank Schleicher | 2020-03-10 |
| 9312485 | Process and materials for making contained layers and devices made with same | Adam Fennimore, Denis Y. Kondakov, Steve Mackara | 2016-04-12 |
| 8652998 | Branched copolymer/anthranilic diamide compositions for propagule coating | Wilson Tam | 2014-02-18 |
| 8431491 | Method for membrane protection during reactive ion/plasma etching processing for via or cavity formation in semiconductor manufacture | Chester E. Balut, Stephen E. Vargo | 2013-04-30 |
| 8270145 | Screen-printable encapsulants based on soluble polybenzoxazoles | Thomas E. Dueber, John D. Summers | 2012-09-18 |
| 8048604 | Hydrofluoroalkanesulfonic acids and salts from fluorovinyl ethers | Christopher P. Junk, Mark Andrew Harmer, Andrew Edward Feiring, Zoe Schnepp | 2011-11-01 |
| 7834113 | Photoresist compositions and processes for preparing the same | James R. Sounik, Michael Fryd | 2010-11-16 |
| 7834209 | Hydrofluoroalkanesulfonic acids from fluorovinyl ethers | Christopher P. Junk, Mark Andrew Harmer, Andrew Edward Feiring, Zoe Schnepp | 2010-11-16 |
| 7696292 | Low-polydispersity photoimageable acrylic polymers, photoresists and processes for microlithography | William B. Farnham, Michael Fryd | 2010-04-13 |
| 7507522 | Photoresists comprising polymers derived from fluoroalcohol-substituted polycyclic monomers | Michael Karl Crawford, Hoang Vi Tran, Fredrick Claus Zumsteg, Jr., Andrew Edward Feiring, Michael Fryd | 2009-03-24 |
| 7408013 | Low-polydispersity photoimageable polymers and photoresists and processes for microlithography | Andrew Edward Feiring, Michael Fryd | 2008-08-05 |
| 7326796 | Fluorinated monomers, fluorinated polymers having polycyclic groups with fused 4-membered heterocyclic rings, useful as photoresists, and processes for microlithography | Andrew Edward Feiring, Viacheslav A. Petrov, Bruce E. Smart, William B. Farnham | 2008-02-05 |
| 7312287 | Fluorinated polymers useful as photoresists, and processes for microlithography | Andrew Edward Feiring, William B. Farnham, Jerald Feldman | 2007-12-25 |
| 7264914 | Fluorinated polymers having polycyclic groups with fused 4-membered carbocyclic rings, useful as photoresists, and processes for microlithography | Andrew Edward Feiring, Viacheslav A. Petrov, Bruce E. Smart, William B. Farnham | 2007-09-04 |
| 7261993 | Photoresists and processes for microlithography | Michael Fryd, Mookkan Periyasamy | 2007-08-28 |
| 7217495 | Fluorinated polymers, photoresists and processes for microlithography | Andrew Edward Feiring, Jerald Feldman | 2007-05-15 |
| 7205086 | Multilayer elements containing photoresist compositions and their use in microlithography | Larry Berger | 2007-04-17 |
| 7166416 | Protecting groups in polymers, photoresists and processes for microlithography | Andrew Edward Feiring, Viacheslav A. Petrov | 2007-01-23 |
| 7108953 | Dissolution inhibitors in photoresist compositions for microlithography | Larry Berger, Jerald Feldman, Viacheslav A. Petrov, Andrew Edward Feiring, Fredrick Claus Zumsteg, Jr. | 2006-09-19 |
| 7045268 | Polymers blends and their use in photoresist compositions for microlithography | Larry Berger | 2006-05-16 |
| 7022457 | Photoresists with hydroxylated, photoacid-cleavable groups | William B. Farnham, Andrew Edward Feiring, Weiming Qiu | 2006-04-04 |
| 7019092 | Fluorinated copolymers for microlithography | Andrew Edward Feiring, Gary N. Taylor | 2006-03-28 |
| 6974657 | Compositions for microlithography | Larry Berger, Michael Karl Crawford, Jerald Feldman, Lynda Kaye Johnson, Fredrick Claus Zumsteg, Jr. | 2005-12-13 |
| 6951705 | Polymers for photoresist compositions for microlithography | Michael Fryd, Periyasamy Mookkan | 2005-10-04 |
| 6899995 | Protecting groups in polymers, photoresists and processes for microlithography | Andrew Edward Feiring, Viacheslav A. Petrov | 2005-05-31 |