Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4500628 | Process of making solid state devices using silicon containing organometallic plasma developed resists | — | 1985-02-19 |
| 4400235 | Etching apparatus and method | Gerald A. Coquin, Joseph M. Moran | 1983-08-23 |
| 4396704 | Solid state devices produced by organometallic plasma developed resists | — | 1983-08-02 |
| 4377437 | Device lithography by selective ion implantation | Thirumalai Venkatesan | 1983-03-22 |
| 4232110 | Solid state devices formed by differential plasma etching of resists | — | 1980-11-04 |
| 4225664 | X-ray resist containing poly(2,3-dichloro-1-propyl acrylate) and poly(glycidyl methacrylate-co-ethyl acrylate) | Joseph M. Moran | 1980-09-30 |
| 4185202 | X-ray lithography | Robert E. Dean, Dan Maydan, Joseph M. Moran | 1980-01-22 |