Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672854 | Display device | Tohru Okabe, Ryosuke Gunji, Shinsuke Saida, Hiroharu Jinmura, Yoshihiro Nakada +1 more | 2020-06-02 |
| 10636855 | Display device | Tohru Okabe, Ryosuke Gunji, Shinsuke Saida, Hiroharu Jinmura, Yoshihiro Nakada +1 more | 2020-04-28 |
| 8466048 | Selective recrystallization of semiconductor | Yoshiyuki Itoh, Masashi Maekawa, Norihisa Asano | 2013-06-18 |
| 7387131 | Processing apparatus and substrate processing method | Osamu Kuroda, Takayuki Toshima | 2008-06-17 |
| 6827814 | Processing apparatus, processing system and processing method | Shigenori Kitahara, Takanori Miyazaki, Hironobu Nishi, Yoshinori Kato | 2004-12-07 |
| 6634370 | Liquid treatment system and liquid treatment method | Satoshi Nakashima, Wataru Okase, Takenobu Matsuo, Tameyasu Hyakuzuka, Yasushi Yagi +6 more | 2003-10-21 |
| 6589338 | Device for processing substrate | Mitsunori Nakamori, Takanori Miyazaki | 2003-07-08 |
| 6520733 | Substrate transport and apparatus | Hiroyuki Ataka | 2003-02-18 |
| 6431184 | Apparatus and method for washing substrate | — | 2002-08-13 |
| 6357457 | Substrate cleaning apparatus and method | Youichi Tanaka, Toshihiko Takahashi | 2002-03-19 |
| 6276378 | Apparatus for cleaning both sides of substrate | Toshikazu Arihisa | 2001-08-21 |
| 6247479 | Washing/drying process apparatus and washing/drying process method | Yuji Kamikawa, Kotaro Tsurusaki | 2001-06-19 |
| 6245156 | Substrate transport method and apparatus, and substrate processing system | Hiroyuki Ataka | 2001-06-12 |
| 6115867 | Apparatus for cleaning both sides of substrate | Satoshi Nakashima, Takanori Miyazaki, Toshikazu Arihisa | 2000-09-12 |
| 6096233 | Method for wet etching of thin film | Miyako Yamasaka, Hiroyuki Kudou, Akira Yonemizu | 2000-08-01 |
| 5421905 | Method for washing wafers | Kinya Ueno | 1995-06-06 |
| 5261431 | Washing apparatus | Kinya Ueno | 1993-11-16 |