Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150190 | Hybrid metrology method and system | Yanir Hainick, Yonatan Oren | 2021-10-19 |
| 11143601 | Test structure design for metrology measurements in patterned samples | Oded Cohen, Igor Turovets | 2021-10-12 |
| 11099142 | X-ray based measurements in patterned structure | — | 2021-08-24 |
| 11029258 | Optical phase measurement method and system | Danny Grossman, Dror Shafir, Yoav Berlatzky, Yanir Hainick | 2021-06-08 |
| 10876959 | Method and system for optical characterization of patterned samples | Dror Shafir, Shay Wolfling, Michal Haim YACHINI, Matthew Sendelbach, Cornel Bozdog | 2020-12-29 |
| 10761036 | Method and system for optical metrology in patterned structures | Boris Levant, Yanir Hainick, Vladimir Machavariani, Roy Koret | 2020-09-01 |
| 10732116 | Hybrid metrology method and system | Yanir Hainick, Yonatan Oren | 2020-08-04 |
| 10663408 | Optical phase measurement system and method | Dror Shafir, Yanir Hainick, Shahar Gov | 2020-05-26 |
| 10564106 | Raman spectroscopy based measurements in patterned structures | Yanir Hainick, Yonatan Oren, Vladimir Machavariani | 2020-02-18 |
| 10365231 | Optical phase measurement method and system | Dror Shafir, Yanir Hainick, Shahar Gov | 2019-07-30 |
| 10365163 | Optical critical dimension metrology | Dror Shafir, Danny Grossman | 2019-07-30 |
| 10359369 | Metrology test structure design and measurement scheme for measuring in patterned structures | Oded Cohen | 2019-07-23 |
| 10311198 | Overlay design optimization | Tal Verdene, Michal Haim YACHINI, Dror Shafir, Changman Moon, Shay Wolfling | 2019-06-04 |
| 10274435 | Method and system for optical metrology in patterned structures | Boris Levant, Yanir Hainick, Vladimir Machavariani, Roy Koret | 2019-04-30 |
| 10216098 | Test structure for use in metrology measurements of patterns | Oded Cohen, Igor Turovets | 2019-02-26 |
| 10209206 | Method and system for determining strain distribution in a sample | Shay Wolfling, Cornel Bozdog, Matthew Sendelbach | 2019-02-19 |
| 10161885 | Optical phase measurement method and system | Danny Grossman, Dror Shafir, Yoav Berlatzky, Yanir Hainick | 2018-12-25 |
| 10073045 | Optical method and system for measuring isolated features of a structure | Yanir Hainick, Dror Shafir | 2018-09-11 |
| 10054423 | Optical method and system for critical dimensions and thickness characterization | Dror Shafir, Shay Wolfling | 2018-08-21 |
| 10041838 | Optical critical dimension metrology | Dror Shafir, Danny Grossman | 2018-08-07 |
| 10018574 | Optical method and system for defects detection in three-dimensional structures | Elad Dotan, Alon Belleli | 2018-07-10 |
| 9897553 | Optical phase measurement method and system | Dror Shafir, Yanir Hainick, Shahar Gov | 2018-02-20 |
| 9651498 | Optical method and system for detecting defects in three-dimensional structures | Elad Dotan, Alon Belleli | 2017-05-16 |
| 9140544 | Optical system and method for measuring in patterned structures | Boaz Brill | 2015-09-22 |
| 8848185 | Optical system and method for measuring in three-dimensional structures | Boaz Brill | 2014-09-30 |