Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384137 | Molded resin product having varied wall thickness and resin composition forming the same | Haruyasu Mizutani, Tadashi Yamamoto, Chisato Masuya | 2002-05-07 |
| 6214442 | Resin molded product and method for producing the same | Haruyasu Mizutani | 2001-04-10 |
| 6118516 | Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns | Nobuyuki Irie, Nobutaka Magome, Naomasa Shiraishi, Shigeru Hirukawa | 2000-09-12 |
| 6080446 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Atsushi Sekiguchi, Hitoshi Jimba, So Won Kim | 2000-06-27 |
| 5883704 | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system | Kenji Nishi, Kazuo Ushida, Seiro Murakami, Tohru Kiuchi | 1999-03-16 |
| 5729337 | Inclination detecting apparatus | — | 1998-03-17 |
| 5693439 | Exposure method and apparatus | Seiro Murakami, Kenji Nishi | 1997-12-02 |
| 5502311 | Method of and apparatus for detecting plane position | Yuji Imai, Shinji Wakamoto | 1996-03-26 |
| 5461237 | Surface-position setting apparatus | Shinji Wakamoto, Yuji Imai | 1995-10-24 |
| 5448332 | Exposure method and apparatus | Yasuyuki Sakakibara, Seiro Murakami, Kenji Nishi | 1995-09-05 |