Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Yasuaki Tanaka, Atsushi Sekiguchi, So Won Kim | 2002-10-29 |
| 6080446 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Ryoki Tobe, Yasuaki Tanaka, Atsushi Sekiguchi, So Won Kim | 2000-06-27 |
| 5672385 | Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas | So Won Kim, Atsushi Sekiguchi | 1997-09-30 |