Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471781 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Yasuaki Tanaka, Atsushi Sekiguchi, Hitoshi Jimba, So Won Kim | 2002-10-29 |
| 6468604 | Method for manufacturing a titanium nitride thin film | Hiroshi Doi, Atsushi Sekiguchi | 2002-10-22 |
| 6080446 | Method of depositing titanium nitride thin film and CVD deposition apparatus | Yasuaki Tanaka, Atsushi Sekiguchi, Hitoshi Jimba, So Won Kim | 2000-06-27 |
| 5891349 | Plasma enhanced CVD apparatus and process, and dry etching apparatus and process | Masao Sasaki, Atsushi Sekiguchi, Ken-ichi Takagi | 1999-04-06 |
| 5855685 | Plasma enhanced CVD apparatus, plasma enhanced processing apparatus and plasma enhanced CVD method | Atsushi Sekiguchi, Masao Sasaki | 1999-01-05 |
| 5721021 | Method of depositing titanium-containing conductive thin film | Masao Sasaki, Atsushi Sekiguchi, Ken-ichi Takagi | 1998-02-24 |