Issued Patents All Time
Showing 26–50 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8638422 | Exposure method, exposure apparatus, method for producing device, and method for evaluating exposure apparatus | — | 2014-01-28 |
| 8525971 | Lithographic apparatus with cleaning of substrate table | — | 2013-09-03 |
| 8520184 | Immersion exposure apparatus and device manufacturing method with measuring device | — | 2013-08-27 |
| 8456608 | Maintenance method, maintenance device, exposure apparatus, and device manufacturing method | Tomoharu Fujiwara, Yasufumi Nishii | 2013-06-04 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8384877 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2013-02-26 |
| 8236467 | Exposure method, exposure apparatus, and device manufacturing method | Tomoharu Fujiwara | 2012-08-07 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 8174668 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2012-05-08 |
| 8169592 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2012-05-01 |
| 8130363 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2012-03-06 |
| 8130361 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Yuho Kanaya, Tadashi Nagayama | 2012-03-06 |
| 8125612 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno | 2012-02-28 |
| 8115902 | Exposure apparatus, device manufacturing method, maintenance method, and exposure method | — | 2012-02-14 |
| 8089608 | Exposure apparatus, exposure method, and device manufacturing method | Hiroyuki Nagasaka, Tomoharu Fujiwara, Soichi Owa, Akihiro Miwa | 2012-01-03 |
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2011-12-06 |
| 8064039 | Exposure method, exposure apparatus, and device manufacturing method | Ryuichi Hoshika, Tomoharu Fujiwara | 2011-11-22 |
| 8023100 | Exposure apparatus, supply method and recovery method, exposure method, and device producing method | — | 2011-09-20 |
| 7982857 | Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion | Yasufumi Nishii, Hirotaka Kohno | 2011-07-19 |
| 7804576 | Maintenance method, maintenance device, exposure apparatus, and device manufacturing method | Tomoharu Fujiwara, Yasufumi Nishii | 2010-09-28 |
| 7614736 | Printing apparatus | Hideyuki Miyake, Mitsutoshi Ikawa, Ryoichi Kawai | 2009-11-10 |
| 7557900 | Exposure apparatus, device manufacturing method, maintenance method, and exposure method | — | 2009-07-07 |
| 7529321 | Radio digital signal receiver | Shoichi Suzuki, Akihiro Horii, Shoji Matsuda, Takahiro Wada | 2009-05-05 |
| 7489424 | Device for preventing image quality reduction caused by incidental light | Hideyuki Miyake, Takashi Suda | 2009-02-10 |
| 7388649 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Katsushi Nakano, Soichi Owa | 2008-06-17 |