Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871469 | Method for fabricating waveguides | Dan Maydan | 2011-01-18 |
| 7837790 | Formation and treatment of epitaxial layer containing silicon and carbon | Yihwan Kim | 2010-11-23 |
| 7737007 | Methods to fabricate MOSFET devices using a selective deposition process | Yihwan Kim, Errol Antonio C. Sanchez, Nicholas C. Dalida | 2010-06-15 |
| 7732305 | Use of Cl2 and/or HCl during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Xiaowei Li, Ali Zojaji, Nicholas C. Dalida +2 more | 2010-06-08 |
| 7682940 | Use of Cl2 and/or HCl during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Xiaowei Li, Ali Zojaji, Nicholas C. Dalida +2 more | 2010-03-23 |
| 7674337 | Gas manifolds for use during epitaxial film formation | David Masayuki Ishikawa, Craig Metzner, Ali Zojaji, Yihwan Kim | 2010-03-09 |
| 7651948 | Pre-cleaning of substrates in epitaxy chambers | Yihwan Kim, Jean R. Vatus, Lori D. Washington, Ali Zojaji | 2010-01-26 |
| 7598178 | Carbon precursors for use during silicon epitaxial film formation | Rohini Kodali, Ali Zojaji, Yihwan Kim | 2009-10-06 |
| 7572715 | Selective epitaxy process with alternating gas supply | Yihwan Kim | 2009-08-11 |
| 7521365 | Selective epitaxy process with alternating gas supply | Yihwan Kim | 2009-04-21 |
| 7517775 | Methods of selective deposition of heavily doped epitaxial SiGe | Yihwan Kim | 2009-04-14 |
| 7439142 | Methods to fabricate MOSFET devices using a selective deposition process | Yihwan Kim, Errol Antonio C. Sanchez, Nicholas C. Dalida | 2008-10-21 |
| 7312128 | Selective epitaxy process with alternating gas supply | Yihwan Kim | 2007-12-25 |
| 7235492 | Low temperature etchant for treatment of silicon-containing surfaces | — | 2007-06-26 |
| 7166528 | Methods of selective deposition of heavily doped epitaxial SiGe | Yihwan Kim | 2007-01-23 |
| 7132338 | Methods to fabricate MOSFET devices using selective deposition process | Yihwan Kim, Errol Antonio C. Sanchez, Nicholas C. Dalida | 2006-11-07 |
| 6911401 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Lori D. Washington, Herman Diniz, Lance A. Scudder | 2005-06-28 |
| 6905542 | Waveguides such as SiGeC waveguides and method of fabricating the same | Dean Berlin | 2005-06-14 |
| 6876442 | Method of calibrating and using a semiconductor processing system | Jean R. Vatus, David K. Carlson, Lance A. Scudder, Paul B. Comita, Annie Karpati | 2005-04-05 |
| 6770134 | Method for fabricating waveguides | Dan Maydan | 2004-08-03 |
| 6494959 | Process and apparatus for cleaning a silicon surface | Dale R. DuBois, Bradley M. Curelop, David Carlson, Paul B. Comita | 2002-12-17 |
| 6455814 | Backside heating chamber for emissivity independent thermal processes | Dale R. DuBois, Lance A. Scudder, Paul B. Comita, Lori D. Washington, David K. Carlson +1 more | 2002-09-24 |
| 6342453 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Lori D. Washington, Herman Diniz, Lance A. Scudder | 2002-01-29 |