Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6003185 | Hesitation free roller | Albert M. Saenz, David L. Thrasher, William G. Drapak | 1999-12-21 |
| 5868863 | Method and apparatus for cleaning of semiconductor substrates using hydrofluoric acid (HF) | Diane Hymes, Michael Ravkin, Xiuhua Zhang | 1999-02-09 |
| 5861066 | Method and apparatus for cleaning edges of contaminated substrates | Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett +3 more | 1999-01-19 |
| 5853522 | Drip chemical delivery apparatus | Lane L. Larson | 1998-12-29 |
| 5840129 | Hesitation free roller | Albert M. Saenz, David L. Thrasher, William G. Drapak | 1998-11-24 |
| 5762755 | Organic preclean for improving vapor phase wafer etch uniformity | Michael A. McNeilly, John deLarios, Glenn Nobinger, Dah-Bin Kao, Ralph K. Manriquez +1 more | 1998-06-09 |
| 5762084 | Megasonic bath | David L. Thrasher, Lynn Ryle | 1998-06-09 |
| 5723019 | Drip chemical delivery method and apparatus | Lane L. Larson | 1998-03-03 |
| 5693148 | Process for brush cleaning | Mark Simmons | 1997-12-02 |
| 5304398 | Chemical vapor deposition of silicon dioxide using hexamethyldisilazane | James P. Garcia, Daniel Dobkin, Frederick F. Walker, Jose F. Casillas | 1994-04-19 |