Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7077731 | Chemical mechanical planarization (CMP) system and method for preparing a wafer in a cleaning module | — | 2006-07-18 |
| 6200201 | Cleaning/buffer apparatus for use in a wafer processing device | Mikhael Ravkin, John deLarios, Thomas R. Gockel | 2001-03-13 |
| 6145148 | Method and apparatus for cleaning of semiconductor substrates using hydrofluoric acid (HF) | Diane Hymes, Michael Ravkin, Wilbur C. Krusell | 2000-11-14 |
| 5868863 | Method and apparatus for cleaning of semiconductor substrates using hydrofluoric acid (HF) | Diane Hymes, Michael Ravkin, Wilbur C. Krusell | 1999-02-09 |