Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5762755 | Organic preclean for improving vapor phase wafer etch uniformity | Michael A. McNeilly, John deLarios, Glenn Nobinger, Wilbur C. Krusell, Dah-Bin Kao +1 more | 1998-06-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5762755 | Organic preclean for improving vapor phase wafer etch uniformity | Michael A. McNeilly, John deLarios, Glenn Nobinger, Wilbur C. Krusell, Dah-Bin Kao +1 more | 1998-06-09 |