Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7169231 | Gas distribution system with tuning gas | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Xingcai Su +2 more | 2007-01-30 |
| 7078350 | Methods for the optimization of substrate etching in a plasma processing system | Jisoo Kim, Binet Worsham, Peter Loewenhardt | 2006-07-18 |
| 7041230 | Method for selectively etching organosilicate glass with respect to a doped silicon carbide | Xingcai Su, Peter Loewenhardt | 2006-05-09 |
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sangheon Lee, Sean S. Kang, Binet Worsham, Reza Sadjadi +1 more | 2005-12-27 |
| 6930048 | Etching a metal hard mask for an integrated circuit structure | Siyi Li, S.M. Sadjadi, Sean S. Kang, Tri C. Le, Scott Briggs | 2005-08-16 |
| 6527911 | Configurable plasma volume etch chamber | Tuqiang Ni, Lumin Li, David Hemker | 2003-03-04 |