Issued Patents All Time
Showing 25 most recent of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728135 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Merritt Funk, Zhiying Chen | 2023-08-15 |
| 10796916 | Microwave plasma device | Merritt Funk, Jianping Zhao | 2020-10-06 |
| 10734200 | Mono-energetic neutral beam activated chemical processing system and method of using | — | 2020-08-04 |
| 10395903 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Merritt Funk | 2019-08-27 |
| 10388528 | Non-ambipolar electric pressure plasma uniformity control | Zhiying Chen, Jianping Zhao, Merritt Funk | 2019-08-20 |
| 10375812 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Jianping Zhao, Merritt Funk, Radha Sundararajan | 2019-08-06 |
| 10354841 | Plasma generation and control using a DC ring | Jianping Zhao, Barton Lane, Merritt Funk, Radha Sundararajan | 2019-07-16 |
| 10147613 | Neutral beam etching of Cu-containing layers in an organic compound gas environment | Audunn Ludviksson | 2018-12-04 |
| 10002744 | System and method for controlling plasma density | Peter L. G. Ventzek, Barton Lane | 2018-06-19 |
| 9978568 | Self-sustained non-ambipolar direct current (DC) plasma at low power | Zhiying Chen, Merritt Funk | 2018-05-22 |
| 9966239 | Non-ambipolar plasma enhanced DC/VHF phasor | Zhiying Chen | 2018-05-08 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9941126 | Microwave plasma device | Merritt Funk, Jianping Zhao | 2018-04-10 |
| 9934974 | Microwave plasma device | Jianping Zhao, Merritt Funk | 2018-04-03 |
| 9852893 | Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus | Demetre J. Economou, Jianping Zhao, Merritt Funk | 2017-12-26 |
| 9799494 | Energetic negative ion impact ionization plasma | Merritt Funk | 2017-10-24 |
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2017-10-17 |
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek | 2017-08-08 |
| 9697993 | Non-ambipolar plasma ehncanced DC/VHF phasor | Zhiying Chen | 2017-07-04 |
| 9668332 | Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma | Merritt Funk, Zhiying Chen | 2017-05-30 |
| 9530621 | Integrated induction coil and microwave antenna as an all-planar source | Peter L. G. Ventzek | 2016-12-27 |
| 9520275 | Mono-energetic neutral beam activated chemical processing system and method of using | — | 2016-12-13 |
| 9455133 | Hollow cathode device and method for using the device to control the uniformity of a plasma process | Kazuki Denpoh, Peter L. G. Ventzek, Lin Xu | 2016-09-27 |
| 9431218 | Scalable and uniformity controllable diffusion plasma source | Jianping Zhao, Radha Sundararajan, Merritt Funk | 2016-08-30 |
| 9396955 | Plasma tuning rods in microwave resonator processing systems | Jianping Zhao, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek | 2016-07-19 |