Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773645 | Remote plasma generator using ceramic | Ja Woo Lee, Chung Huan Jeon, Heok-Jae Lee, Jang-Hyoun Youm, Sang Jean Jeon +7 more | 2017-09-26 |
| 8083892 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Dae-Kyu Choi, Do-In Bae, Wan-Goo Hwang, Jin-Man Kim | 2011-12-27 |
| 7764483 | Semiconductor etching apparatus | Jin-Man Kim, Young-Min Min, Sang-Ho Kim | 2010-07-27 |
| 7578944 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Young-Min Min, Dae-Kyu Choi, Do-In Bae, Wan-Goo Hwang, Jin-Man Kim | 2009-08-25 |
| 7193369 | Method for generating gas plasma | Young-Min Min, Dae-Kyu Choi, Do-In Bae, Wan-Goo Hwang, Jin-Man Kim | 2007-03-20 |
| 6860801 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Kyung-Dae Kim, Hyung-Sik Hong, Min Gyu Kim | 2005-03-01 |
| 6824617 | Input/output valve switching apparatus of semiconductor manufacturing system | Jin-Man Kim, Young-Min Min, Chang Hyun Jo | 2004-11-30 |
| 6816029 | RF matching unit | Dae-Kyu Choi, Young-Min Min, Sang-Mun Chon, Jin-Man Kim | 2004-11-09 |
| 6705020 | Method of and apparatus for use in orienting an object at a reference angle | Gyeong-Su Keum, Hyung-Sik Hong, Gum-Chan An, Hae-Keun Youn, Byoung-Sik Jung +1 more | 2004-03-16 |
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Jin-Man Kim, Sang-Jun Chun, Young-Min Min | 2004-02-03 |
| 6623597 | Focus ring and apparatus for processing a semiconductor wafer comprising the same | Oh-Yeon Han, Guk-Kwang Kim, Byeung-Wook Choi | 2003-09-23 |
| 6537143 | Pedestal of a load-cup which supports wafers loaded/unloaded onto/from a chemical mechanical polishing apparatus | Kyung-Dae Kim, Hyung-Sik Hong, Min Gyu Kim | 2003-03-25 |
| 6443826 | Polishing head of a chemical mechanical polishing apparatus and, retainer ring of the same | Hun Cha, Kyung-Dae Kim, Min Gyu Kim | 2002-09-03 |
| 6039770 | Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers | Hun Cha, Seung-Ki Chae | 2000-03-21 |