Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361784 | Method of inspecting a DNA chip and apparatus thereof | Toshihiko Nakata, Tomoaki Sakata, Kenji Yasuda, Satoshi Takahashi | 2013-01-29 |
| 8089614 | Device for changing pitch between light beam axes, and substrate exposure apparatus | Yoshitatsu Naito, Mituhiro Suzuki, Tsuyoshi Yamaguchi, Shigenobu Maruyama | 2012-01-03 |
| 7969636 | Laser direct imaging apparatus | Yoshitatsu Naito, Mitsuhiro Suzuki | 2011-06-28 |
| 7755741 | Substrate exposure apparatus and illumination apparatus | Kazuo Kobayashi | 2010-07-13 |
| 7604925 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2009-10-20 |
| 7598020 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2009-10-06 |
| 7400753 | Biological sample optical measuring method and biological sample optical measuring apparatus | Taisaku Seino, Satoshi Takahashi, Kenji Yasuda | 2008-07-15 |
| 7372478 | Pattern exposure method and pattern exposure apparatus | Yoshitatsu Naito, Mituhiro Suzuki, Bunji Uchiyama, Tsuyoshi Yamaguchi | 2008-05-13 |
| 7309568 | Method in inspecting DNA and apparatus therefor | Satoshi Takahashi, Kenji Yasuda, Taisaku Seino | 2007-12-18 |
| 7277155 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2007-10-02 |
| 7217573 | Method of inspecting a DNA chip | Toshihiko Nakata, Tomoaki Sakata, Kenji Yasuda, Satoshi Takahashi | 2007-05-15 |
| 7092058 | Method and apparatus for imparting alignment to alignment layer through generation of two kinds of polarized light from a single light source and treatment with both | Aki Sakai, Noboru Kunimatsu | 2006-08-15 |
| 7064813 | Apparatus and method for measuring micro area in specimen | Satoshi Takahashi, Kenji Yasuda, Taisaku Seino | 2006-06-20 |
| 7012671 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2006-03-14 |
| 6760105 | Method and apparatus for inspecting DNA and method for detecting fluorescence | Satoshi Takahashi, Taisaku Seino, Kenji Yasuda | 2004-07-06 |
| 6485891 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2002-11-26 |
| 6455944 | Alignment of an optical assembly | Takeshi Kato, Tatsuo Teraoka, Satoru Kikuchi, Masahiro Aoki | 2002-09-24 |
| 6335146 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2002-01-01 |
| 6094268 | Projection exposure apparatus and projection exposure method | Tetsuzo Tanimoto, Minoru Tanaka | 2000-07-25 |
| 6016187 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2000-01-18 |
| 5767949 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 1998-06-16 |
| 5684565 | Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system | Hisafumi Iwata, Yasuhiro Yoshitake, Minoru Yoshida, Yukihiro Shibata | 1997-11-04 |
| 5677755 | Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them | Yasuhiko Nakayama, Masahiro Watanabe, Minoru Yoshida, Kenichirou Fukuda | 1997-10-14 |
| 5526094 | Exposure apparatus and method | Minori Noguchi, Yukio Kenbo, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 1996-06-11 |
| 5414239 | Optical apparatus for laser machining | Takao Terabayashi, Hidemi Sato, Hideaki Tanaka | 1995-05-09 |