Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6094268 | Projection exposure apparatus and projection exposure method | Yoshitada Oshida, Minoru Tanaka | 2000-07-25 |
| 5227862 | Projection exposure apparatus and projection exposure method | Yoshitada Oshida, Minoru Tanaka | 1993-07-13 |
| 5016149 | Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same | Minoru Tanaka, Yoshitada Oshida, Yasuhiro Yoshitake | 1991-05-14 |