Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8089614 | Device for changing pitch between light beam axes, and substrate exposure apparatus | Yoshitada Oshida, Yoshitatsu Naito, Tsuyoshi Yamaguchi, Shigenobu Maruyama | 2012-01-03 |
| 7372478 | Pattern exposure method and pattern exposure apparatus | Yoshitada Oshida, Yoshitatsu Naito, Bunji Uchiyama, Tsuyoshi Yamaguchi | 2008-05-13 |