Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9153693 | FinFET gate with insulated vias and method of making same | Hong Yu, Wang Zheng, Huang Liu | 2015-10-06 |
| 8962407 | Method and device to achieve self-stop and precise gate height | Hong Yu, Wang Haiting, James Lee, Huang Liu | 2015-02-24 |
| 8241927 | Methods relating to capacitive monitoring of layer characteristics during back end-of the-line processing | Jihong Choi, Roderick A. Augur, Eden Zielinski | 2012-08-14 |
| 8066552 | Multi-layer polishing pad for low-pressure polishing | Alain Duboust, Shou-Sung Chang, Wei Lu, Siew Neo, Yan Wang +1 more | 2011-11-29 |
| 7070480 | Method and apparatus for polishing substrates | Kapila Wijekoon | 2006-07-04 |
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana, Yongqi Hu +6 more | 2005-11-01 |
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana, Yongqi Hu +6 more | 2004-09-14 |