| 7367873 |
Substrate processing apparatus |
Masayuki Nakanishi, Kenro Nakamura |
2008-05-06 |
| 7108589 |
Polishing apparatus and method |
Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, Junji Kunisawa, Hiroyuki Yano |
2006-09-19 |
| 7066787 |
Substrate processing apparatus |
Masayuki Nakanishi, Kenro Nakamura |
2006-06-27 |
| RE38878 |
Polishing apparatus |
Masayoshi Hirose, Manabu Tsujimura, Seiji Ishikawa, Norio Kimura |
2005-11-15 |
| 6935932 |
Polishing apparatus and method |
Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, Junji Kunisawa, Hiroyuki Yano |
2005-08-30 |
| 6905400 |
Method and apparatus for dressing polishing cloth |
Norio Kimura, Toyomi Nishi, Takayoshi Kawamoto, Takeshi Sakurai |
2005-06-14 |
| 6790129 |
Method for polishing angular substrates |
Jiro Moriya, Masataka Watanabe, Satoshi Okazaki, Hidekazu Ozawa, Shunichiro Kojima |
2004-09-14 |
| 6767504 |
Heat treatment furnace |
Kiyoyuki Hattori, Toshiyuki Harada |
2004-07-27 |
| 6722964 |
Polishing apparatus and method |
Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, Junji Kunisawa, Hiroyuki Yano |
2004-04-20 |
| 6645053 |
Polishing apparatus |
Norio Kimura, Yoshikuni Tateyama |
2003-11-11 |
| RE38228 |
Polishing apparatus |
Masayoshi Hirose, Seiji Ishikawa, Norio Kimura, Kiyotaka Kawashima |
2003-08-19 |
| 6364752 |
Method and apparatus for dressing polishing cloth |
Norio Kimura, Toyomi Nishi, Takayoshi Kawamoto, Takeshi Sakurai |
2002-04-02 |
| 5921852 |
Polishing apparatus having a cloth cartridge |
Norio Kimura |
1999-07-13 |
| 5716264 |
Polishing apparatus |
Norio Kimura, Ritsuo Kikuta, Masayoshi Hirose |
1998-02-10 |
| 5679063 |
Polishing apparatus |
Norio Kimura, Hozumi Yasuda, Koji Saito, Masako Watase, Shiro Mishima |
1997-10-21 |
| 5651725 |
Apparatus and method for polishing workpiece |
Ritsuo Kikuta, Tamami Takahashi |
1997-07-29 |
| 5651724 |
Method and apparatus for polishing workpiece |
Norio Kimura, Takayoshi Kawamoto, Katsuyuki Aoki, Kunio Tateishi, Hozumi Yasuda +1 more |
1997-07-29 |
| 5476414 |
Polishing apparatus |
Masayoshi Hirose, Manabu Tsujimura, Seiji Ishikawa, Norio Kimura |
1995-12-19 |
| 5398459 |
Method and apparatus for polishing a workpiece |
Katsuya Okumura, Tohru Watanabe, Riichirou Aoki, Hiroyuki Yano, Masako Kodera +4 more |
1995-03-21 |
| 5384986 |
Polishing apparatus |
Masayoshi Hirose, Seiji Ishikawa, Norio Kimura, Kiyotaka Kawashima |
1995-01-31 |