Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12248253 | Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device | Masaki Kato | 2025-03-11 |
| 11899372 | Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device | Masaki Kato | 2024-02-13 |
| 11642845 | Three-dimensional printer comprising first and second print heads and first, second, and third dividers | Alex Stockton | 2023-05-09 |
| 11602894 | Detecting lack of adhesion of a build plate to a support bed | Jason Greene | 2023-03-14 |
| 10120283 | Illumination method, illumination optical device, and exposure device | — | 2018-11-06 |
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2018-07-17 |
| 9513558 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2016-12-06 |
| 8947635 | Illumination optical system, exposure apparatus, and device manufacturing method | Hirohisa Tanaka | 2015-02-03 |
| 8908151 | Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system | Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake +3 more | 2014-12-09 |
| 8780327 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2014-07-15 |
| 8760617 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2014-06-24 |
| 8749759 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2014-06-10 |
| 8384877 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2013-02-26 |
| 8174668 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2012-05-08 |
| 8169592 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2012-05-01 |
| 8139198 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2012-03-20 |
| 8130363 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2012-03-06 |
| 8125612 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Kenichi Shiraishi | 2012-02-28 |
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2011-12-06 |
| 7889320 | Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method | Eizo Ohya, Kyoji Nakamura | 2011-02-15 |
| 7837858 | Method for starting autothermal reformer | Yukihiro Sugiura | 2010-11-23 |
| 7667829 | Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing method | Koji Kaise, Toru Fujii | 2010-02-23 |
| 7388649 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2008-06-17 |
| 7042008 | Image sensor and method of manufacturing the same | Yoshikatsu Kuroda, Tadayuki Takahashi | 2006-05-09 |
| 6975387 | Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device | — | 2005-12-13 |