Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476077 | Interferometric stage positioning apparatus | Marcel Koenraad Marie Baggen, Engelbertus Antonius Fransiscus Van Der Pasch | 2022-10-18 |
| 10768025 | Encoder, position measurement system and lithographic apparatus involving an enclosing device | Jan P. Baartman, Allard Eelco Kooiker, Suzanne Johanna Antonetta Geertruda Cosijns, Bryan Tong-Minh | 2020-09-08 |
| 9177219 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Wim Tjibbo Tel, Thomas Theeuwes, Alexander Padiy | 2015-11-03 |
| 7599043 | Position measurement system and lithographic apparatus | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch | 2009-10-06 |
| 7535578 | Lithographic apparatus and interferometer system | — | 2009-05-19 |
| 7348574 | Position measurement system and lithographic apparatus | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch | 2008-03-25 |
| 7333174 | Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness | Willem Herman Gertruda Anna Koenen, Arthur Winfried Eduardus Minnaert, Luberthus Ouwehand, Johannes Mathias Theodorus Antonius Adriens | 2008-02-19 |
| 7310130 | Lithographic apparatus and position measuring method | Emiel Jozef Melanie Eussen, Tjarko Adriaan Rudolf Van-Empel | 2007-12-18 |
| 7251042 | Lithographic apparatus, interferometer and device manufacturing method | — | 2007-07-31 |
| 6987557 | Enhanced lithographic displacement measurement system | Engelbertus A. F. van de Pasch, Robert F. Dillon, Philip D. Henshaw | 2006-01-17 |
| 6747729 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition | Philip D. Henshaw, Engelbertus A. F. van de Pasch, Marcel Hendrikus Maria Beems | 2004-06-08 |