Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Chansoo Kang, Youngdo Kim, Hoonseop KIM, Sangki Nam +2 more | 2024-09-10 |
| 11798788 | Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode | Sang Ki Nam, Sunggil Kang, Sungyong Lim, Beomjin Yoo, Akira Koshiishi +1 more | 2023-10-24 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Akira Koshiishi, Kwangyoub Heo, Sunggil Kang, Beomjin Yoo +1 more | 2021-03-16 |
| 10566176 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Doug Yong Sung, Ki Ho Hwang | 2020-02-18 |
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Beom Jin Yoo, Sang Ki Nam, Kwang Heo, Jehun Woo, Sang Heon Lee +1 more | 2019-09-10 |
| 9601397 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Doug Yong Sung, Ki Ho Hwang | 2017-03-21 |
| 9136094 | Method of plasma processing and apparatuses using the method | Jung-Hyun Cho, Hyung Joon Kim, Sang Jean Jeon, Sang Heon Lee, Jeong Yun Lee +1 more | 2015-09-15 |
| 7804250 | Apparatus and method to generate plasma | Andrey Ushakov, Yuri Tolmachev, Vladimir Volynets, Won Ceak Pak, Sung-Chang Park +1 more | 2010-09-28 |