Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985689 | Patterning 3D features in a substrate | Eric Anthony Perozziello, Gregory L. Wojcik, Andreas Goebel, Claes Bjorkman | 2011-07-26 |
| 7799678 | Method for forming a through silicon via layout | Ritwik Chatterjee, Kurt H. Junker | 2010-09-21 |
| 7648914 | Method for etching having a controlled distribution of process results | Theodoros Panagopoulos, Nicolas Gani, Wilfred Pau, Meihua Shen, John Holland | 2010-01-19 |
| 7579228 | Disposable organic spacers | Paul A. Grudowski, Kurt H. Junker, Andrew G. Nagy | 2009-08-25 |
| 6440864 | Substrate cleaning process | Jeremiah T. Pender, Henry Fong, Charles Peter Auglis, Raymond Hung, Hongqing Shan | 2002-08-27 |