Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648914 | Method for etching having a controlled distribution of process results | Thomas J. Kropewnicki, Theodoros Panagopoulos, Nicolas Gani, Meihua Shen, John Holland | 2010-01-19 |
| 6635573 | Method of detecting an endpoint during etching of a material within a recess | Meihua Shen, Jeffrey D. Chinn | 2003-10-21 |