Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10579768 | Process compatibility improvement by fill factor modulation | Vladimir Levinski, Eitan Hajaj, Sharon Aharon, Michael Adel, Yuri Paskover +5 more | 2020-03-03 |
| 10527951 | Compound imaging metrology targets | Raviv Yohanan, Eran Amit, Mark Ghinovker, Nuriel Amir | 2020-01-07 |
| 10303835 | Method and apparatus for direct self assembly in target design and production | Eran Amit, Raviv Yohanan, Nuriel Amir, Roie Volkovich, DongSub Choi | 2019-05-28 |
| 10203200 | Analyzing root causes of process variation in scatterometry metrology | Tal Marciano, Michael Adel, Mark Ghinovker, Barak Bringoltz, Dana Klein +2 more | 2019-02-12 |
| 9903711 | Feed forward of metrology data in a metrology system | Ady Levy, Daniel Kandel, Michael Adel, Leonid Poslavsky, John Robinson +9 more | 2018-02-27 |
| 9476838 | Hybrid imaging and scatterometry targets | DongSub Choi, David Tien | 2016-10-25 |
| 9093458 | Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets | Nuriel Amir, DongSub Choi, Daniel Kandel | 2015-07-28 |