| 7850509 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more |
2010-12-14 |
| 7491117 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more |
2009-02-17 |
| 7156725 |
Substrate polishing machine |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more |
2007-01-02 |
| 7083507 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more |
2006-08-01 |
| 6899592 |
Polishing apparatus and dressing method for polishing tool |
Kazuto Hirokawa, Akira Kodera |
2005-05-31 |
| 6899604 |
Dressing apparatus and polishing apparatus |
Tetsuji Togawa, Ikutaro Noji, Nobuyuki Takada |
2005-05-31 |
| 6852019 |
Substrate holding apparatus |
Tetsuji Togawa, Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Kunihiko Sakurai +4 more |
2005-02-08 |
| 6790129 |
Method for polishing angular substrates |
Jiro Moriya, Masataka Watanabe, Satoshi Okazaki, Hidekazu Ozawa, You Ishii |
2004-09-14 |
| 6435949 |
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof |
Seiji Katsuoka, Hozumi Yasuda, Tadakazu Sone, Manabu Tsujimura |
2002-08-20 |
| 6409582 |
Polishing apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi, Toyomi Nishi |
2002-06-25 |
| 6293858 |
Polishing device |
Norio Kimura, Toru Maruyama, Seiji Katsuoka, Shin Ohwada |
2001-09-25 |
| 6241592 |
Polishing apparatus |
Tetsuji Togawa |
2001-06-05 |
| 6050884 |
Polishing apparatus |
Tetsuji Togawa, Kuniaki Yamaguchi, Toyomi Nishi |
2000-04-18 |
| 5934984 |
Polishing apparatus |
Tetsuji Togawa |
1999-08-10 |