Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8061923 | Blind motorized coupling arrangements for coupling UV light source subsystem and scanner subsystem in a UV lithography system and methods therefor | — | 2011-11-22 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Alexander I. Ershov +2 more | 2011-01-18 |
| 7453077 | EUV light source | Norbert Bowering, Bjorn Hansson | 2008-11-18 |
| 7402825 | LPP EUV drive laser input system | John Viatella, Jerzy Hoffman, R. Kyle Webb, Alexander N. Bykanov, Oleh Khodykin | 2008-07-22 |
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2008-05-06 |
| 7291853 | Discharge produced plasma EUV light source | Igor V. Fomenkov, William N. Partlo, Gerry Blumenstock, Nortbert Bowering, I. Roger Oliver +1 more | 2007-11-06 |
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2005-12-06 |
| D471720 | Camouflage fabric | — | 2003-03-18 |