Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7186943 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more | 2007-03-06 |
| 7132618 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more | 2006-11-07 |
| 7030335 | Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Gerald Yin, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr. +3 more | 2006-04-18 |
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Jang-Gyoo Yang, Daniel J. Hoffman, James D. Carducci, Douglas A. Buchberger, Jr., Matthew L. Miller +2 more | 2005-05-31 |
| 6894245 | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more | 2005-05-17 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Xiaoye Zhao, Ananda H. Kumar +3 more | 2004-01-13 |
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Steven C. Shannon, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +4 more | 2003-12-23 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Xiaoye Zhao, Ananda H. Kumar +3 more | 2003-07-01 |