Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383712 | Polymer-bound sensitizer | Leo L. Linehan, Wayne M. Moreau, Randolph J. Smith | 2002-05-07 |
| 6303416 | Method to reduce plasma etch fluting | James A. Bruce, Mary Conroy Bushey, Walter E. Mlyriko, Dianne L. Sundling | 2001-10-16 |
| 6136498 | Polymer-bound sensitizer | Leo L. Linehan, Wayne M. Moreau, Randolph J. Smith | 2000-10-24 |
| 6074800 | Photo acid generator compounds, photo resists, and method for improving bias | Gregory Breyta, Phillip Brock, Daniel J. Dawson, Ronald A. DellaGuardia, Charlotte R. DeWan +6 more | 2000-06-13 |
| 5399462 | Method of forming sub-half micron patterns with optical lithography using bilayer resist compositions comprising a photosensitive polysilsesquioxane | Krishna G. Sachdev, Robert N. Lang, Harbans S. Sachdev, Ratnam Sooriyakumaran, Joel R. Whitaker | 1995-03-21 |
| 5338818 | Silicon containing positive resist for DUV lithography | William R. Brunsvold, Steve S. Miura, Melvin Montgomery, Harbans S. Sachdev, Ratnam Sooriyakumaran | 1994-08-16 |
| 5296332 | Crosslinkable aqueous developable photoresist compositions and method for use thereof | Harbans S. Sachdev, Willard E. Conley, Ahmad D. Katnani, Ranee W. Kwong, Leo L. Linehan +2 more | 1994-03-22 |