Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6944578 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Stephen E. Knight, Robert K. Leidy +2 more | 2005-09-13 |
| 6917901 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Stephen E. Knight, Robert K. Leidy +2 more | 2005-07-12 |
| 6303416 | Method to reduce plasma etch fluting | James A. Bruce, Mary Conroy Bushey, Premlatha Jagannathan, Walter E. Mlyriko | 2001-10-16 |