Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6944578 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Robert K. Leidy, Keith J. Machia +2 more | 2005-09-13 |
| 6917901 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Robert K. Leidy, Keith J. Machia +2 more | 2005-07-12 |
| 6766507 | Mask/wafer control structure and algorithm for placement | James A. Bruce, Joshua J. Krueger, Matthew Nicholls, Jed H. Rankin | 2004-07-20 |
| 6383719 | Process for enhanced lithographic imaging | Orest Bula, Daniel C. Cole, Edward W. Conrad, Robert K. Leidy | 2002-05-07 |
| 6278515 | Method and apparatus for adjusting a tilt of a lithography tool | Charles A. Whiting | 2001-08-21 |
| 5486267 | Method for applying photoresist | Stephen E. Luce, Thomas L. McDevitt | 1996-01-23 |