Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6944578 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Vincent J. Carlos, James Doran, Stephen E. Knight, Robert K. Leidy, Keith J. Machia +2 more | 2005-09-13 |
| 6917901 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Vincent J. Carlos, James Doran, Stephen E. Knight, Robert K. Leidy, Keith J. Machia +2 more | 2005-07-12 |
| 6683306 | Array foreshortening measurement using a critical dimension scanning electron microscope | Emily E. Fisch, Debra L. Meunier | 2004-01-27 |
| 6414308 | Method for determining opened/unopened semiconductor contacts using a scanning electron microscope | — | 2002-07-02 |