Charles A. Whiting — 17 Patents at IBM

Charles A. Whiting has been granted 17 US patents while listed as an inventor at IBM. The first was granted in 1996 and the most recent in November 2005. Charles A. Whiting ranks #263,971 of 4,157,543 US inventors in our database (top 6.3%). Patent records list Charles A. Whiting in Colchester, VT, US.

Patents per Year

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Showing 1–17 of 17 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
6968288	Method for detection of photolithographic defocus	Dennis L. Macaluso, Richard A. Phelps	2005-11-22	$6,353,000
6856378	Method of photolithographic exposure dose control as a function of resist sensitivity	Keith J. Machia, Matthew Nicholls, Charles J. Parrish, Craig E. Schneider	2005-02-15	$11,729,000
6735492	Feedback method utilizing lithographic exposure field dimensions to predict process tool overlay settings	Edward W. Conrad, John S. Smyth, David A. Ziemer	2004-05-11	$7,887,000
6694498	Feed-forward lithographic overlay offset method and system	Edward W. Conrad, Charles J. Parrish	2004-02-17	$14,035,000
6674516	Method of photolithographic exposure dose control as a function of resist sensitivity	Keith J. Machia, Matthew Nicholls, Charles J. Parrish, Craig E. Schneider	2004-01-06	$7,683,000
6606533	Method and arrangement for controlling image size of integrated circuits on wafers through post-exposure bake hotplate-specific dose feedback	—	2003-08-12	$22,104,000
6518679	Capacitive alignment structure and method for chip stacking	Ning Lu, Wilbur D. Pricer	2003-02-11	$11,665,000
6412666	Fluid container with a keying means to prevent improper fluid loading in a fluid delivery tool and a system including such fluid container and fluid delivery tool	Dennis P. Hogan, Christopher E. Walsh	2002-07-02	$11,850,000
6377334	Method for controlling image size of integrated circuits on wafers supported on hot plates during post exposure baking of the wafers	—	2002-04-23	$16,630,000
6342735	Dual use alignment aid	James J. Colelli, Steven J. Holmes, Peter H. Mitchell, Joseph Mundenar	2002-01-29	$17,392,000
6278515	Method and apparatus for adjusting a tilt of a lithography tool	Stephen E. Knight	2001-08-21	$21,309,000
6235439	Method for controlling image size of integrated circuits on wafers supported on hot plates during post exposure baking of the wafers	—	2001-05-22	$28,959,000
6100506	Hot plate with in situ surface temperature adjustment	James J. Colelli, Randall A. Leggett, Joseph Mundenar	2000-08-08	$34,993,000
5783309	Recovery of an anodically bonded glass device from a substrate by use of a metal interlayer	Thomas B. Faure, Kurt R. Kimmel, Wilbur D. Pricer	1998-07-21	$12,143,000
5716763	Liquid immersion heating process for substrate temperature uniformity	Douglas E. Benoit, Harold G. Linde, Denise M. Puisto	1998-02-10	$18,636,000
5712078	High contrast photoresists comprising acid sensitive crosslinked polymeric resins	Wu-Song Huang, Harold G. Linde	1998-01-27	$18,838,000
5538151	Recovery of an anodically bonded glass device from a susstrate by use of a metal interlayer	Thomas B. Faure, Kurt R. Kimmel, Wilbur D. Pricer	1996-07-23	$7,499,000

Charles A. Whiting — 17 Patents

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