Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521383 | Pattern density tailoring for etching of advanced lithographic masks | Maheswaran Surendra, Cameron Brooks | 2003-02-18 |
| 6365326 | Pattern density tailoring for etching of advanced lithographic mask | Maheswaran Surendra, Cameron Brooks | 2002-04-02 |
| 6287434 | Plating cell apparatus for x-ray mask fabrication | Robin J. Ackel, Michael H. Charland, Thomas B. Faure | 2001-09-11 |
| 6039858 | Plating process for x-ray mask fabrication | Robin J. Ackel, Michael H. Charland, Thomas B. Faure | 2000-03-21 |
| 5716763 | Liquid immersion heating process for substrate temperature uniformity | Harold G. Linde, Denise M. Puisto, Charles A. Whiting | 1998-02-10 |