Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plating cell apparatus for x-ray mask fabrication

Plating cell apparatus for x-ray mask fabrication

US Patent 6287434 · Granted Sep 11, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Protection of photomasks from 193nm radiation damage using thin coatings of ALD 2021
Techniques for reducing degradation and/or modifying feature size of photomasks2013
Structure for partitioned dummy fill shapes for reduced mask bias with alternati2010
Method to etch chrome for photomask fabrication2010
Structure and method for partitioned dummy fill shapes for reduced mask bias wit2010
Method for dry etching photomask material2006
CD uniformity of chrome etch to photomask process2006
Method of inhibiting contaminants using dilute acid rinse2004
Pattern density tailoring for etching of advanced lithographic masks2003
Method of minimizing contaminating deposits using dilute acid rinse2002
Plasma resistant composition and use thereof2002
Single component developer for use with ghost exposure2002