Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6177680 | Correction of pattern-dependent errors in a particle beam lithography system | Gregory J. Dick, Abigail S. Ganong, John G. Hartley, John W. Pavick | 2001-01-23 |
| 5716763 | Liquid immersion heating process for substrate temperature uniformity | Douglas E. Benoit, Harold G. Linde, Charles A. Whiting | 1998-02-10 |
| 5424548 | Pattern specific calibration for E-beam lithography | — | 1995-06-13 |