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Method of fine-tuning process controls during integrated circuit chip manufacturing based on substrate backside roughness |
Shawn A. Adderly, Kyle Babinski, Daniel A. Delibac, David A. DeMuynck, Shawn R. Goddard +2 more |
2017-02-21 |
| 9330988 |
Method of fine-tuning process controls during integrated circuit chip manufacturing based on substrate backside roughness |
Shawn A. Adderly, Kyle Babinski, Daniel A. Delibac, David A. DeMuynck, Shawn R. Goddard +2 more |
2016-05-03 |
| 6965808 |
System and method for optimizing metrology sampling in APC applications |
Edward W. Conrad, John S. Smyth, Daniel Sullivan |
2005-11-15 |
| 6922600 |
System and method for optimizing manufacturing processes using real time partitioned process capability analysis |
Edward W. Conrad, John S. Smyth, Daniel Sullivan |
2005-07-26 |
| 6856378 |
Method of photolithographic exposure dose control as a function of resist sensitivity |
Keith J. Machia, Matthew Nicholls, Charles J. Parrish, Charles A. Whiting |
2005-02-15 |
| 6674516 |
Method of photolithographic exposure dose control as a function of resist sensitivity |
Keith J. Machia, Matthew Nicholls, Charles J. Parrish, Charles A. Whiting |
2004-01-06 |
| 6557163 |
Method of photolithographic critical dimension control by using reticle measurements in a control algorithm |
Jed H. Rankin, John S. Smyth, Andrew J. Watts |
2003-04-29 |
| 6172924 |
Memory device with a sense amplifier |
Gary R. Gilliam, Steve G. Renfro, Kacey Cutler, Roland Ochoa |
2001-01-09 |
| 6058058 |
Memory device with a sense amplifier |
Gary R. Gilliam, Steve G. Renfro, Kacey Cutler, Roland Ochoa |
2000-05-02 |
| 5940338 |
Memory device with a sense amplifier |
Gary R. Gilliam, Steve G. Renfro, Kacey Cutler, Roland Ochoa |
1999-08-17 |
| 5901099 |
Memory device with a sense amplifier |
Gary R. Gilliam, Steve G. Renfro, Kacey Cutler, Roland Ochoa |
1999-05-04 |
| 5812470 |
Apparatus, system and method for identifying semiconductor memory access modes |
Roland Ochoa, Kacey Cutler, Gary R. Gilliam, Steven G. Renfro |
1998-09-22 |
| 5744978 |
Variable load device responsive to a circuit parameter |
Gary R. Gilliam, Steve G. Renfro, Kacey Cutler, Roland Ochoa |
1998-04-28 |
| 5627785 |
Memory device with a sense amplifier |
Gary R. Gilliam, Steve G. Renfro, Kacey Cutler, Roland Ochoa |
1997-05-06 |
