Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8193005 | MEMS process method for high aspect ratio structures | Steven M. Shank | 2012-06-05 |
| 6856378 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Matthew Nicholls, Craig E. Schneider, Charles A. Whiting | 2005-02-15 |
| 6694498 | Feed-forward lithographic overlay offset method and system | Edward W. Conrad, Charles A. Whiting | 2004-02-17 |
| 6674516 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Matthew Nicholls, Craig E. Schneider, Charles A. Whiting | 2004-01-06 |