Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635390 | Method and system for reducing particulate contamination in a pellicle air space | Karen D. Badger, Dean C. Humphrey | 2003-10-21 |
| 6342735 | Dual use alignment aid | Steven J. Holmes, Peter H. Mitchell, Joseph Mundenar, Charles A. Whiting | 2002-01-29 |
| 6207333 | Mask with attenuating phase-shift and opaque regions | William J. Adair, Erik Puttlitz, Timothy J. Toth, Arthur C. Winslow | 2001-03-27 |
| 6100506 | Hot plate with in situ surface temperature adjustment | Randall A. Leggett, Joseph Mundenar, Charles A. Whiting | 2000-08-08 |