Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156548 | Measurement methodology of advanced nanostructures | Manh Dang Nguyen, Phillip Atkins, Alexander Kuznetsov, Liequan Lee, Natalia Malkova +3 more | 2021-10-26 |
| 10481088 | Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures | Mark Backues, Leonid Poslavsky | 2019-11-19 |
| 9470639 | Optical metrology with reduced sensitivity to grating anomalies | Guorong V. Zhuang, Shankar Krishnan, Lanhua Wei, Walter D. Mieher | 2016-10-18 |
| 9127927 | Techniques for optimized scatterometry | Jonathan Iloreta, Hanyou Chu, Jeffrey A. Chard, Peilin Jiang, Mikhail Sushchik +2 more | 2015-09-08 |
| 7760358 | Film measurement | Leonid Poslavsky | 2010-07-20 |
| 7375828 | Modal method modeling of binary gratings with improved eigenvalue computation | Leonid Poslavsky | 2008-05-20 |
| 7362686 | Film measurement using reflectance computation | Philip D. Flanner, III, Leonid Poslavsky | 2008-04-22 |
| 7345761 | Film measurement | Philip D. Flanner, III, Leonid Poslavsky | 2008-03-18 |
| 7190453 | Film measurement | Philip D. Flanner, III, Leonid Poslavsky | 2007-03-13 |