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Mark Backues

KL Kla-Tencor: 1 patents #809 of 1,394Top 60%
📍 San Diego, CA: #15,630 of 23,606 inventorsTop 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10481088 Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures Paul Aoyagi, Leonid Poslavsky 2019-11-19