Issued Patents All Time
Showing 25 most recent of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422754 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Sangjine Park | 2025-09-23 |
| 12420316 | Substrate processing apparatus and substrate processing method | Sangjine Park, Jihwan Park | 2025-09-23 |
| 12308255 | Apparatus and method for drying substrate | Sangjine Park, Jihoon Jeong, Younghoo Kim | 2025-05-20 |
| 12278133 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Jihwan Park, Seungmin Shin | 2025-04-15 |
| 12225634 | Substrate heating apparatus and method for processing a substrate | Taehong Kim, Younghoo Kim, Sunghyun Park | 2025-02-11 |
| 12216408 | Apparatus for drying wafer and method for drying wafer | Sangjine Park, Jihoon Jeong, Younghoo Kim | 2025-02-04 |
| 12211716 | Substrate processing apparatus and substrate processing method | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Jihoon Jeong, Seohyun Kim +2 more | 2025-01-28 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Sangjine Park, Keonyoung Kim, Sukhoon Kim +3 more | 2025-01-14 |
| 12057323 | Substrate processing method, micropattern forming method, and substrate processing apparatus | Sangjine Park, Seohyun Kim, Sukhoon Kim, Jihoon Jeong, Younghoo Kim | 2024-08-06 |
| 11964357 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Taemin Earmme, Byoungho Kwon | 2024-04-23 |
| 11935772 | Apparatus for processing a substrate | Seohyun Kim, Younghoo Kim, Sangjine Park, Jihoon Jeong | 2024-03-19 |
| 11881426 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Jihwan Park, Seungmin Shin | 2024-01-23 |
| 11798801 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Seungho Kim, Younghoo Kim, Taehong Kim +1 more | 2023-10-24 |
| 11654458 | Substrate-cleaning apparatus having tiltable roll brush | Yonghee Lee, Byoungho Kwon | 2023-05-23 |
| 11646203 | Thin film formation apparatus and method using plasma | Junyeong Lee, Minkyu Park, Insun Yi, Beomseok Kim, Youngseok Kim | 2023-05-09 |
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Sangjine Park | 2023-05-02 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2023-03-21 |
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Yungjun Kim, Hyunjoon Park, Taemin Earmme, Seungchul Han +1 more | 2023-02-28 |
| 11482410 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Seungho Kim, Younghoo Kim, Taehong Kim +1 more | 2022-10-25 |
| 11471996 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Taemin Earmme, Byoungho Kwon | 2022-10-18 |
| 11342203 | Substrate cleaning apparatus and substrate cleaning method using the same | Jihoon Jeong, Mihyun PARK, Yongsun Ko, Kwangwook Lee, Hayoung JEON +2 more | 2022-05-24 |
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Yong-Jhin Cho, Chawon Koh, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2021-04-27 |
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim | 2020-11-03 |
| 10361100 | Apparatus and methods for treating a substrate | Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim +2 more | 2019-07-23 |