Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203021 | Substrate processing device and etching liquid | Tetsuya Sakazaki, Koji Kagawa, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2025-01-21 |
| 11723259 | Substrate processing apparatus and method of processing substrate | Jun Nonaka, Kazuya Koyama, Mitsunori Nakamori | 2023-08-08 |
| 11306249 | Substrate processing method, substrate processing device and etching liquid | Tetsuya Sakazaki, Koji Kagawa, Kenji Sekiguchi, Kazuyoshi Mizumoto | 2022-04-19 |
| 11049723 | Substrate processing method and substrate processing apparatus | Rintaro Higuchi, Koji Kagawa, Kenji Sekiguchi | 2021-06-29 |
| 9415356 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Hiroshi Tanaka, Fumihiro Kamimura | 2016-08-16 |
| 9339775 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Hiroshi Tanaka, Fumihiro Kamimura | 2016-05-17 |
| 9099502 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Hiroshi Tanaka, Fumihiro Kamimura | 2015-08-04 |
| 8701308 | Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing method | Takayuki Toshima | 2014-04-22 |
| 8522712 | Template treatment method, program, computer storage medium, template treatment apparatus and imprint system | Takanori Nishi, Takahiro Kitano, Shoichi Terada | 2013-09-03 |
| 8468943 | Imprint method, computer storage medium and imprint apparatus | Takanori Nishi, Shoichi Terada, Takahiro Kitano | 2013-06-25 |
| 8303724 | Substrate processing method and non-transitory storage medium for carrying out such method | Yuji Kamikawa, Takayuki Toshima, Naoki Shindo | 2012-11-06 |
| 8152928 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Naoki Shindo, Yuji Kamikawa | 2012-04-10 |
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Yuji Kamikawa, Takayuki Toshima, Naoki Shindo | 2011-09-13 |
| 7998306 | Substrate processing apparatus | Hideyuki Yamamoto, Kazuhiro Takeshita, Takayuki Toshima | 2011-08-16 |