| 12337438 |
Break-in processing apparatus and break-in processing method |
Osamu Nabeya |
2025-06-24 |
| 12237194 |
Substrate transporter and substrate processing apparatus including substrate transporter |
Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Fong-Jie Du, Makoto Kashiwagi +5 more |
2025-02-25 |
| D1021832 |
Elastic membrane |
Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more |
2024-04-09 |
| D989012 |
Elastic membrane |
Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more |
2023-06-13 |
| D981969 |
Elastic membrane for semiconductor wafer polishing apparatus |
Tomoko Owada, Osamu Nabeya, Makoto Fukushima, Yuichi Kato |
2023-03-28 |
| D981459 |
Retaining ring for substrate |
Osamu Nabeya |
2023-03-21 |
| 11511389 |
Polishing head and polishing apparatus |
Makoto Kashiwagi, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi, Tetsuji Togawa +1 more |
2022-11-29 |
| 10593570 |
Substrate holding module, substrate processing apparatus, and substrate processing method |
Akihiro Yazawa, Kenichi Kobayashi |
2020-03-17 |
| 10525564 |
Reversing machine and substrate polishing apparatus |
Kenichi Kobayashi, Akihiro Yazawa, Manao Hoshina |
2020-01-07 |
| 10160013 |
Rinsing bath and substrate cleaning method using such rinsing bath |
Masahiko Sekimoto, Toshio Yokoyama, Kenichi Kobayashi |
2018-12-25 |
| 10141211 |
Substrate processing apparatus and substrate transfer method |
Toshio Yokoyama, Masahiko Sekimoto, Kenichi Kobayashi, Takashi Mitsuya, Keiichi Kurashina |
2018-11-27 |
| 9786532 |
Substrate processing apparatus and method of transferring a substrate |
Toshio Yokoyama, Masahiko Sekimoto, Kenichi Kobayashi, Takashi Mitsuya, Keiichi Kurashina |
2017-10-10 |