Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9664909 | Monolithic optical beam splitter with focusing lens | Bret Whiteside, Patrick J. Czarnota, Sam Shamouilian | 2017-05-30 |
| 9255891 | Inspection beam shaping for improved detection sensitivity | Christian Wolters, Zhiwei Xu | 2016-02-09 |
| 9194812 | Illumination energy management in surface inspection | Christian Wolters, Aleksey Petrenko, Kurt L. Haller, Zhiwei Xu, Stephen Biellak +1 more | 2015-11-24 |
| 9182358 | Multi-spot defect inspection system | Zhiwei Xu, Christian Wolters, Bret Whiteside, Guoheng Zhao, Jijen Vazhaeparambil +3 more | 2015-11-10 |
| 9116132 | Surface scanning inspection system with independently adjustable scan pitch | Christian Wolters | 2015-08-25 |
| 8934091 | Monitoring incident beam position in a wafer inspection system | Aleksey Petrenko, Richard Fong, Bret Whiteside, Jien Cao, Christian Wolters +2 more | 2015-01-13 |
| 8885158 | Surface scanning inspection system with adjustable scan pitch | Christian Wolters | 2014-11-11 |
| 8786850 | Illumination energy management in surface inspection | Christian Wolters, Aleksey Petrenko, Kurt L. Haller, Zhiwei Xu, Stephen Biellak +1 more | 2014-07-22 |
| 8755044 | Large particle detection for multi-spot surface scanning inspection systems | Charles Amsden, Jiayao Zhang, Christian Wolters | 2014-06-17 |
| 8269960 | Computer-implemented methods for inspecting and/or classifying a wafer | Louis Vintro, Prasanna Dighe, Andrew J. Steinbach, Daniel Kavaldjiev, Stephen Biellak | 2012-09-18 |
| 7528944 | Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool | David K. Chen, Andrew J. Steinbach, Daniel Kavaldjiev, Alexander Belyaev | 2009-05-05 |
| 7511816 | Methods and systems for determining drift in a position of a light beam with respect to a chuck | Yevgeny Kruptesky, Christian Wolters | 2009-03-31 |