Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11718515 | Liquid sale management device | Naoyuki Yamashita, Takashi Wada, Kenji Kusunoki | 2023-08-08 |
| 11498825 | Liquid quality managing device and method | Naoyuki Yamashita, Yasuhiro Kurabe, Shinsuke Mitsuhata, Takashi Wada, Kenji Kusunoki +2 more | 2022-11-15 |
| 11430675 | Substrate processing apparatus and processing liquid reuse method | Hideaki Sato, Kouzou Kanagawa | 2022-08-30 |
| 11410861 | Substrate liquid processing apparatus | Takashi Nagai, Hideaki Sato, Kenji Goto | 2022-08-09 |
| 11332357 | Liquid quality control device | Naoyuki Yamashita, Takashi Wada, Kenji Kusunoki | 2022-05-17 |
| 10026629 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program | Mitsunori Nakamori, Teruomi Minami | 2018-07-17 |
| 9272894 | Liquid delivery system and liquid-flowpath regulating device | Takashi Wada, Kenji Kusunoki | 2016-03-01 |
| 9209506 | Resonant circuit having a plurality of cables disposed in series in a circular manner | Haruo Ikeda, Shunsaku Koga | 2015-12-08 |
| 9103451 | Device for stopping flow of fluid | Takashi Wada, Kenji Kusunoki | 2015-08-11 |
| D732326 | Beer dispenser | Kenji Kato, Teruhiko Kitamura | 2015-06-23 |
| D731838 | Beer dispenser | Kenji Kato, Teruhiko Kitamura | 2015-06-16 |
| D728306 | Beer dispenser | Kenji Kato, Kosuke Yoshimura, Soichiro Nishimura, Teruhiko Kitamura | 2015-05-05 |
| 8733592 | Liquid delivery system, liquid-delivery switching device, and liquid-flowpath regulating device | Takashi Wada, Kenji Kusunoki | 2014-05-27 |
| 8703400 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Osamu Miyahara, Hideharu Kyouda | 2014-04-22 |
| 8366872 | Substrate treatment method, coating film removing apparatus, and substrate treatment system | Kenji Tsutsumi, Osamu Miyahara, Hideharu Kyouda | 2013-02-05 |
| 8111372 | Coating film forming apparatus and coating film forming method for immersion light exposure | Hideharu Kyouda, Taro Yamamoto | 2012-02-07 |
| 8083959 | Substrate processing method, substrate processing system, and computer-readable storage medium | Hideharu Kyouda, Osamu Miyahara, Kenji Tsutsumi | 2011-12-27 |
| 8054443 | Developing method and developing apparatus | Osamu Miyahara, Shinya Wakamizu | 2011-11-08 |
| 8053180 | Developing method and developing unit | Yuko Ono | 2011-11-08 |
| 7977039 | Rinse treatment method, developing treatment method and developing apparatus | Takeshi Shimoaoki | 2011-07-12 |
| 7959988 | Coating film forming apparatus and method | Taro Yamamoto, Yasushi Takiguchi, Akihiro Fujimoto, Hideharu Kyouda, Osamu Miyahara +1 more | 2011-06-14 |
| 7926441 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Osamu Miyahara, Hideharu Kyouda | 2011-04-19 |
| 7924396 | Coating/developing apparatus and pattern forming method | Hisashi Kawano, Hitoshi Kosugi, Koichi Hontake, Masashi Enomoto | 2011-04-12 |
| 7857530 | Developing method and developing unit | Yuko Ono | 2010-12-28 |
| 7794924 | Developing method and developing unit | Yuko Ono | 2010-09-14 |