Issued Patents All Time
Showing 1–25 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422313 | Sensor device for measuring a temperature difference in a computer chip system | Amin Jemili | 2025-09-23 |
| 12252394 | Micromechanical component for a sensor device | — | 2025-03-18 |
| 12230458 | MEMS relay | Matthew Lewis | 2025-02-18 |
| 12230457 | Method for manufacturing a MEMS switch having an embedded metal contact | Matthew Lewis, Peter Schmollngruber | 2025-02-18 |
| 12181356 | Micromechanical component for a pressure and inertial sensor device | Lars Tebje, Johannes Classen | 2024-12-31 |
| 12149903 | Device for detecting sound in the surroundings of an automobile | Amin Jemili, Georg Bischopink | 2024-11-19 |
| 12077429 | Micromechanical sensor device and corresponding production method | Lars Tebje, Johannes Classen | 2024-09-03 |
| 12027336 | Capacitively operable MEMS switch | Matthew Lewis | 2024-07-02 |
| 11975964 | Method for manufacturing a microelectromechanical structure and microelectromechanical structure | Ralf Boessendoerfer | 2024-05-07 |
| 11978658 | Method for manufacturing a polysilicon SOI substrate including a cavity | Peter Schmollngruber | 2024-05-07 |
| 11976995 | Micromechanical component for a capacitive sensor or switch device | — | 2024-05-07 |
| 11932532 | Micromechanical component for a pressure sensor device | — | 2024-03-19 |
| 11912563 | Micromechanical component and method for manufacturing a micromechanical component | Hans Artmann, Christoph Hermes, Heribert Weber, Peter Schmollngruber, Thomas Friedrich | 2024-02-27 |
| 11897756 | Micromechanical device with contact pad | Martin Rambach | 2024-02-13 |
| 11897758 | Electrical contacting and method for producing an electrical contacting | Markus Kuhnke, Stefan Majoni, Timo Schary | 2024-02-13 |
| 11874291 | Method for temperature compensation of a microelectromechanical sensor, and microelectromechanical sensor | Amin Jemili, Dusan Radovic, Rolf Scheben, Steffen Becker | 2024-01-16 |
| 11846509 | Three-axis rotation rate sensor including a substrate and a double rotor | — | 2023-12-19 |
| 11787687 | Method for manufacturing a micromechanical structure and micromechanical structure | Andrea Urban, Luise Fuchs, Thomas Friedrich | 2023-10-17 |
| 11585830 | Micromechanical z-inertial sensor | — | 2023-02-21 |
| 11585710 | Capacitive pressure sensor with reduced bimetal effect | — | 2023-02-21 |
| 11261082 | Micromechanical device and method for manufacturing a micromechanical device | Eckhard Graf, Holger Rumpf, Jens Frey, Kurt-Ulrich Ritzau, Achim Breitling | 2022-03-01 |
| 11214482 | Micromechanical device including a covering bond frame | Martin Rambach | 2022-01-04 |
| 11187528 | Rotation rate sensor, method for manufacturing a rotation rate sensor | Robert Maul | 2021-11-30 |
| 11125771 | Micromechanical z-inertial sensor | — | 2021-09-21 |
| 10913652 | Micromechanical z-inertial sensor | Matthias Kuehnel | 2021-02-09 |